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Ion beam assisted deposition; DLC films; C-N films; tribological properties; RBS analysis

Diamond like carbon films and C-N films were prepared using ion beam assisted deposition technique (IBAD). Tribological properties were studied by subjecting DLC coated films to the accelerated wear tests. These tests indicated a significant improvement in the mechanical surface properties of glass by DLC coating. Better wear features were obtained for thinner DLC coating as compared to the thicker ones. We also studied the optical properties and obtained a band gap of 1·4 eV for these films. An attempt was made to prepare C₃N₄ films by using IBAD. We observed variation in the nitrogen incorporation in the film with the substrate temperature.

J Prabhjyot Pal¹ S C Patil¹ S B Ogale¹ S M Kanetkar¹ L Ganpathy^{1 2} P Rama Rao^{1 2}

1. Department of Physics, University of Poona, Pune - 411 007, India
2. Excel Superconductor Inc., 140-29 Keyland Court, Bohemia, New York - 11710, USA

Published

November 1994