A novel synthetic route for fabricating dense aluminosilicate-based ceramics at relatively low temperatures (⩽1000°C) is described. The method involves ion exchange of an appropriate zeolite powder, followed by fabrication and sintering, to form a dense ceramic. Anorthite, cordierite- andβ-spodumene-based ceramic substrates with attractive physical properties for microelectronic packaging are obtained using these unusual precursors. A brief overview on the property requirements for substrates used in microelectronic packaging is outlined at the beginning of the article.
Volume 43, 2020
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