Films of Y-Ba-Cu-O system have been prepared by rf sputtering from composite Y-Ba-Cu-O targets in an axial magnetic field in 4:1 Ar/O2 mixture on 〈100〉 SrTiO3 and 〈100〉 MgO substrates at 270°C and 450°C. Although back-sputtering caused due to negatively-charged oxygen ions was found to drastically vary the film composition about the centre of the sputtering axis, by properly orienting the substrates with respect to the sputtering axis near-stoichiometric films have been obtained. Films annealed at 900°C in oxygen have shown superconducting onset at 88°K and zero resistance transition at 72°K.
Volume 43, 2020
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