Process parameters optimization for laser deposition of highTc superconducting thin films on Si and other substrate materials
R D Vispute S T Bendre R Viswanathan S M Chaudhari S M Kanetkar S B Ogale
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Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation from a superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density, oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied.
R D Vispute1 S T Bendre1 R Viswanathan1 S M Chaudhari1 S M Kanetkar1 S B Ogale1
Volume 45, 2022
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Prof. Subi Jacob George — Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur, Bengaluru
Chemical Sciences 2020
Prof. Surajit Dhara — School of Physics, University of Hyderabad, Hyderabad
Physical Sciences 2020
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