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- Process parameters optimization for laser deposition of highT_c superconducting thin films on Si and other substrate materials
  
  R D Vispute S T Bendre R Viswanathan S M Chaudhari S M Kanetkar S B Ogale
  
  International Conference On Superconductivity—I Volume 14 Issue 2 April 1991 pp 443-449
- Fulltext
  
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  https://www.ias.ac.in/article/fulltext/boms/014/02/0443-0449
- Keywords
  
  Superconducting thin films; Y-Ba-Cu-O; Si; laser deposition
- Abstract
  
  Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation from a superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density, oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied.
- Author Affiliations
  R D Vispute¹ S T Bendre¹ R Viswanathan¹ S M Chaudhari¹ S M Kanetkar¹ S B Ogale¹
  1. Centre for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune - 411 007, India
- Dates
  
  Published
  April 1991

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