• Laser chemical vapour deposition

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      https://www.ias.ac.in/article/fulltext/boms/011/02-03/0129-0135

    • Keywords

       

      Laser; chemical vapour deposition; LCVD; thin film

    • Abstract

       

      The special role of lasers in material processing is outlined in this article. In the background of the various chemical vapour deposition processes, the laser-induced chemical vapour deposition processes have been described. The unique aspects of pyrolytic and photolytic laser chemical vapour deposition have been stressed. Some of the recent experimental results on thin film deposition by laser have been reviewed. The problems and future of laser deposition processes have also been mentioned.

    • Author Affiliations

       

      S K Roy1

      1. Tata Institute of Fundamental Research, Homi Bhabha Road, Bombay - 400 005, India
    • Dates

       
  • Bulletin of Materials Science | News

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