• Laser processing of III–V compound semiconductors

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    • Keywords


      III–V Compound semiconductors; device technology; implantations; ohmic contacts; laser annealing

    • Abstract


      Lasers have found an increasingly important role in semiconductor processing technology. While they are now widely used in some of the silicon-based device fabrication processes, their applications in III–V compound semiconductor processing are not equally well established. Considerable research work has been carried out to find ways to overcome some of the technical difficulties in their usage in technologies based mainly on GaAs. In this paper, we review these developments and mention possible future directions that will help establish the use of lasers in this very active field.

    • Author Affiliations


      A S Vengurlekar1

      1. Tata Institute of Fundamental Research, Homi Bhabha Road, Bombay - 400 005, India
    • Dates

  • Bulletin of Materials Science | News

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