We present here a new technique, called vapour phase spray pyrolysis, for deposition ofto andito films. Undopedto film showed semiconducting nature, a sheet resistance of 1088 Ω/□, a donor ionization energy level of 40 meV, average visible transmittance of 75·4% andn-type conductivity. The indium doped (ito) film 10 wt % showed metallic nature, a sheet resistance of 15 Ω/□, average visible transmittance of 80·4 % andp-type conductivity. Thus theto andito films showed fairly good electro-optical qualities, comparable to those obtained by sophisticated and costly techniques.
Volume 43, 2020
Continuous Article Publishing mode
Click here for Editorial Note on CAP Mode