X-ray microanalysis in the transmission electron microscope
The technique of x-ray microanalysis of thin specimens in the transmission electron microscope is well established. Quantitative analyses can be obtained by converting observed x-ray intensity ratios into weight fraction ratios by incorporating suitable correction factors.
Flourescence corrections in thin specimens are always significantly less than in bulk specimens and, except where strong characteristic radiation fluorescence enhancement is predicted in the bulk, can be safety ignored. As analysis probes less than 100 Å diameter have become available, the beam spreading has become an important parameter in determining the spatial resolution for analysis.
Present developments are directed at improving the quality of the analyses which can be obtained. This requires the generation of high quality correction factors, particularly forZ<13, rapid and accurate methods of determining sample thickness, so that absorption corrections can be made, and the development of reliable procedures for determining the shape of the activated volume in a thin specimen.
Volume 43, 2020
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