Back Issue - Vol. 34, Part 4,
August 2009

Foreword

Structure, properties, and MEMS and microelectronic applications of vanadium oxides

Robert B Darling and Shiho Iwanaga

RF sputtering: A viable tool for MEMS fabrication

Sudhir Chandra, Vivekanand Bhatt and Ravindra Singh

Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining

A new approach to integrate PLZT thin films with microcantilevers

Biomicrofluidics: Recent trends and future challenges

Tamal Das and Suman Chakraborty

Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

Nitin S Kale, Manoj Joshi,
P Nageswara Rao, S Mukherji and
V Ramgopal Rao

Of light, of MEMS: Optical MEMS in telecommunications and beyond

F Chollet, H B Liu, M Ashraf,
B Thubthimthong, X M Zhang,
G Hegde, A Asundi, V M Murukeshan and A Q Liu

Fabrication of polymer-based reflowed microlenses on optical fibre with control of focal length using differential coating technique

Mohammed Ashraf, Franck Chollet, Murukeshan Matham and Chun Yang

A novel MOEMS pressure sensor: Modelling and experimental evaluation

Patricia M Nieva, Jim Kuo,
Shiuh-Huah W Chiang and
Abdullah Syed

An X band RF MEMS switch based on silicon-on-glass architecture

M S Giridhar, Ashwini Jambhalikar,
J John, R Islam, C L Nagendra,
T K Alex

Design and characterization of in-plane MEMS yaw rate sensor

K P Venkatesh, Nishad Patil,
Ashok Kumar Pandey and Rudra Pratap

Composite Si/PS membrane pressure sensors with micro and macro-porous silicon

L Sujatha and Enakshi Bhattacharya

Effect of metal coating and residual stress on the resonant frequency of MEMS resonators

Ashok Kumar Pandey, K P Venkatesh and Rudra Pratap

System integration design in MEMS –
A case study of micromachined load cell

Shishir Kumar, K P Venkatesh,
S Sam Baskar and S P Madhavi 

Sensors and packages based on LTCC and thick-film technology for severe conditions

C Jacq, Th Maeder and P Ryser